The first part covers EUV, which is key to advanced nodes. Then it moves on to more futuristic and tentative techniques. But the EUV part is a nice introduction for non specialist, with pointers to dig if one is interested.
EUV is an amazing nightmare, but the etching part of the process is pretty straightforward. The difficulty is in finding materials that don't absorb it all and/or break constantly. In my mind, the really interesting tricks and hacks are all the ways they've managed to take 193nm light and etch things that are so much smaller than the wavelength.
The first part covers EUV, which is key to advanced nodes. Then it moves on to more futuristic and tentative techniques. But the EUV part is a nice introduction for non specialist, with pointers to dig if one is interested.