not including warren buffet (ironic that he's considered one of the most ethical guys in the business and he's on top of the world), name a few CEOs. Not a call out, I just want to know who they are so I can start following them
Joel Spolsky and Stackoverflow is a good example. They build a quality product, treat users with respect, and (I guess) are on a good track financially, and make their money in an aboveboard way. They even go so far as to build in some defenses (like Creative Commons licensing) to proactively preempt future possible evildoing.
Stephen Wolfram (though an egomaniac that has picked some unfair fights against his employees) and his company Wolfram Research built a rather solid offering in "old style" proprietary commercial software with Mathematica and now Wolfram Alpha, making his money on incredibly high quality and pouring decades of revenue back into product development and offering a generous free tier of access and deep discounts for educational and personal use.